Browsing by Author "Mueller, Matthias"

Aluminium oxide atomic layer deposition on semiconductor substrates

Fundamental aspects of germanium surface passivation by gas phase oxidation and liquid phase sulfidation

NEXAFS characterization of inorganic and organic materials for semiconductor application

Quantification of high-K nanolayers for semiconductor applications using synchrotron radiation and calibrated instrumentation

Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates

Reference-free, depth dependent characterization of nanoscale materials by combined X-ray reflectivity and grazing incidence X-ray fluorescence analysis

Reference-free, depth-dependent characterization of nanoscaled materials using a combined grazing incidence X-ray fluorescence and X-ray reflectometry approach

Reference-free, in-depth characterization of nanoscaled systems with advanced grazing incidence X-ray fluorescence analysis

Soft x-ray spectroscopy reveals chemical information beneath the surface of organic photovoltaic devices