Browsing by Author "Mukundhan, Priya"
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Publication Imaging of buried overlay and alignment markers using picosecond acoustic microscopy
Proceedings paper2022, Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference, FEB 24-MAY 27, 2022, p.Art. 1205313Publication Non-destructive in-line IMC thickness measurement using acoustic metrology
Proceedings paper2019, International Symposium on Microelectronics: Fall 2019, 1/10/2019, p.274-279