Browsing by Author "Mulkens, Jan"
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Publication E-TEST validation of EPE budget and metrology
Oral presentation2020, SPIE advanced lithography - Metrology, Inspection, and Process Control for Microlithography XXXIVPublication E-test validation of space error budget and metrology
Journal article2022-06-30, IEEE Transactions on Semiconductor Manufacturing, (35) 3, p.478-484Publication Evaluation of local CD and placement distribution on EUV mask and its impact on wafer
Proceedings paper2019, XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology 2019, 16/04/2019, p.1117807-1-1117807-7