Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Mullen, S"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Spin on metal oxide materials for N7 and beyond patterning applications

    Mannaert, Geert  
    ;
    Altamirano Sanchez, Efrain  
    ;
    Hopf, Toby  
    ;
    Sebaai, Farid  
    ;
    Lorant, Christophe  
    Proceedings paper
    2017, Advanced Etch Technology for Nanopatterning VI, 26/02/2017, p.101490T

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings