Browsing by Author "Munnik, Frans"
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Atomic layer deposition of aluminum phosphate layers using tris(dimethylamino)phosphine as P-precursor
Journal article2025-MAR, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (43) 2, p.022409Publication Compositional depth profiling of TaCN thin films
Journal article2012, Journal of Vacuum Science and Technology A, (30) 4, p.41510