Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Compositional depth profiling of TaCN thin films
Publication:
Compositional depth profiling of TaCN thin films
Date
2012
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Adelmann, Christoph
;
Conard, Thierry
;
Franquet, Alexis
;
Brijs, Bert
;
Munnik, Frans
;
Burgess, Simon
;
Witters, Thomas
;
Meersschaut, Johan
;
Kittl, Jorge
;
Vandervorst, Wilfried
;
Van Elshocht, Sven
Journal
Journal of Vacuum Science and Technology A
Abstract
Description
Metrics
Views
1885
since deposited on 2021-10-20
1
last week
Acq. date: 2025-10-28
Citations
Metrics
Views
1885
since deposited on 2021-10-20
1
last week
Acq. date: 2025-10-28
Citations