Browsing by Author "Munoz, J.M."
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Publication A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS
;Scheurle, A. ;Fuchs, T. ;Kehr, K. ;Leinenbach, C. ;Kronmueller, S. ;Arias, A.Ceballos, J.Proceedings paper2007-01, Proceedings IEEE MEMS, 21/01/2007, p.39-42