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Browsing by Author "Munoz, J.M."

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    A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS

    Scheurle, A.
    ;
    Fuchs, T.
    ;
    Kehr, K.
    ;
    Leinenbach, C.
    ;
    Kronmueller, S.
    ;
    Arias, A.
    ;
    Ceballos, J.
    Proceedings paper
    2007-01, Proceedings IEEE MEMS, 21/01/2007, p.39-42

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