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Browsing by Author "Murphy, R.S."

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    Pitch walking assessment after self-aligned double patterning for the 10nm logic technology node

    Zarate Rincon, Fabian
    ;
    Vega Gonzalez, Victor  
    ;
    Ciofi, Ivan  
    ;
    Wilson, Chris  
    ;
    van der Veen, Marleen  
    Meeting abstract
    2016, Materials for Advanced Metallization Conference - MAM, 20/03/2016, p.PD-04

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