Browsing by Author "Murugesan Kuppuswamy, Vijaya-Kumar"
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Publication Critical dimension uniformity and contact edge roughness in extreme ultraviolet lithography: effect of photoacid generator, sensitizer and quencher
;Murugesan Kuppuswamy, Vijaya-Kumar ;Constantoudis, VassiliosGogolides, EvangelosJournal article2013, Journal of Micro/Nanolithography MEMS and MOEMS, (12) 2, p.23003