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Browsing by Author "Murugesan Kuppuswamy, Vijaya-Kumar"

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    Critical dimension uniformity and contact edge roughness in extreme ultraviolet lithography: effect of photoacid generator, sensitizer and quencher

    Murugesan Kuppuswamy, Vijaya-Kumar
    ;
    Constantoudis, Vassilios
    ;
    Gogolides, Evangelos
    Journal article
    2013, Journal of Micro/Nanolithography MEMS and MOEMS, (12) 2, p.23003

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