Browsing by Author "Muster, F."
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Publication Strained silicon on wafer level by wafer bonding: materials processing, strain measurements and strain relaxation
;Reiche, M. ;Moutanabbir, O. ;Himcinschi, C. ;Christiansen, S. ;Erfurth, E. ;Goesele, U.Mantl, S.Proceedings paper2008, Semiconductor Wafer Bonding 10: Science, Technology, and Applications, 12/10/2008, p.311-320