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    Optimal conditions for micromachining Si1-xGex at 210C

    Sedky, Sherif
    ;
    Bayoumy, Ahmed
    ;
    Alaa, Ahmed
    ;
    Nagy, Ahmed
    ;
    Witvrouw, Ann
    Journal article
    2007, Journal of Microelectromechanical Systems, (16) 3, p.581-588

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