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Optimal conditions for micromachining Si1-xGex at 210C
Publication:
Optimal conditions for micromachining Si1-xGex at 210C
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Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sedky, Sherif
;
Bayoumy, Ahmed
;
Alaa, Ahmed
;
Nagy, Ahmed
;
Witvrouw, Ann
Journal
Journal of Microelectromechanical Systems
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1852
since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations
Metrics
Views
1852
since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations