Publication:

Optimal conditions for micromachining Si1-xGex at 210C

Date

2007
Journal article
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-6567-7966
cris.virtualsource.departmentbc1f576c-cd32-4907-b1a1-176876e0cc4a
cris.virtualsource.orcidbc1f576c-cd32-4907-b1a1-176876e0cc4a
dc.contributor.authorSedky, Sherif
dc.contributor.authorBayoumy, Ahmed
dc.contributor.authorAlaa, Ahmed
dc.contributor.authorNagy, Ahmed
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-16T19:33:39Z
dc.date.available2021-10-16T19:33:39Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12871
dc.source.beginpage581
dc.source.endpage588
dc.source.issue3
dc.source.journalJournal of Microelectromechanical Systems
dc.source.volume16
dc.title

Optimal conditions for micromachining Si1-xGex at 210C

dc.typeJournal article
dspace.entity.typePublication
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