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Browsing by Author "Naito, Y."

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    A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret

    Renaud, Michael
    ;
    Altena, Geert
    ;
    Goedbloed, Martijn
    ;
    de Nooijer, Christine  
    ;
    Matova, Svetla
    Proceedings paper
    2013, Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, 16/06/2013, p.693-696

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