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Browsing by Author "Nakajima, M"

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    Publication

    Advanced organic polymers for the aggressive scaling of low-k materials

    Pantouvaki, Marianna  
    ;
    Huffman, Craig
    ;
    Zhao, Larry
    ;
    Heylen, Nancy  
    ;
    Ono, Y
    ;
    Nakajima, M
    ;
    Nakatani, K
    Journal article
    2011, Japanese Journal of Applied Physics, (80) 4, p.04DB01

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