Browsing by Author "Nakajima, M."
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Publication Evaluation of an advanced organic ultra-low-k material
Proceedings paper2009, Advanced Metallization Conference 2008 (AMC 2008), 23/09/2008, p.587-592Publication Integration of an organic ultra low-k (k=2.2) material
Oral presentation2009, Advanced Metallization Conference - AMCPublication Integration of an organic ultra low-k (k=2.2) material
Proceedings paper2010, Advanced Metallization Conference 2009 - AMC 2009, 13/10/2009, p.173-184Publication Process compatibility of new advanced low-k dielectric
Meeting abstract2009, 216th ECS Meeting, 1/10/2009, p.2158