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Integration of an organic ultra low-k (k=2.2) material
Publication:
Integration of an organic ultra low-k (k=2.2) material
Date
2009
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pantouvaki, Marianna
;
Zhao, Larry
;
Huffman, Craig
;
Heylen, Nancy
;
Ferchichi, Abdelkarim
;
Ono, Y.
;
Nakajima, M.
;
Nakatani, K.
;
Struyf, Herbert
;
Beyer, Gerald
;
Baklanov, Mikhaïl
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2070
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
2070
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations