Browsing by Author "Nakajima, Michio"
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Publication Advanced organic polymers for the aggressive scaling of low-k materials
Proceedings paper2010, International Conference on Solid State Devices and Materials - SSDM, 22/09/2010, p.844-845Publication Ultra low-k materials based on self-assembled organic polymers
Proceedings paper2011, Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics, 26/04/2011, p.1335-o01-02