Browsing by Author "Nakamura, K."
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Publication High-Q torsional mode Si triangular beam resonators encapsulated using SiGe thin film
Proceedings paper2010, IEEE International Electron Devices Meeting - IEDM, 6/12/2010, p.154-157Publication The present status of high-Tc superconducting terahertz emitters
Publication Torsional mode MEMS resonator using thin film vacuum package
Oral presentation2012, imec-Handai Symposium