Publication:
Torsional mode MEMS resonator using thin film vacuum package
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1922 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-10-05
Citations
Statistics
Views
1922 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-10-05
Citations