Browsing by Author "Nakamura, Y"
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Publication Supercritical carbon dioxide etching of transition metal (Cu, Ni, Co, Fe) thin films
;Rasadujjaman, Md ;Nakamura, Y ;Watanabe, M ;Kondoh, EBaklanov, MikhaïlJournal article2016, Microelectronic Engineering, 153, p.5-10