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Supercritical carbon dioxide etching of transition metal (Cu, Ni, Co, Fe) thin films
Publication:
Supercritical carbon dioxide etching of transition metal (Cu, Ni, Co, Fe) thin films
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Date
2016
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rasadujjaman, Md
;
Nakamura, Y
;
Watanabe, M
;
Kondoh, E
;
Baklanov, Mikhaïl
Journal
Microelectronic Engineering
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Views
1796
since deposited on 2021-10-23
1
last month
1
last week
Acq. date: 2025-12-11
Citations