Publication:
Supercritical carbon dioxide etching of transition metal (Cu, Ni, Co, Fe) thin films
Date
| dc.contributor.author | Rasadujjaman, Md | |
| dc.contributor.author | Nakamura, Y | |
| dc.contributor.author | Watanabe, M | |
| dc.contributor.author | Kondoh, E | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-23T14:03:53Z | |
| dc.date.available | 2021-10-23T14:03:53Z | |
| dc.date.issued | 2016 | |
| dc.identifier.issn | 0167-9317 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27194 | |
| dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0167931715301192 | |
| dc.source.beginpage | 5 | |
| dc.source.endpage | 10 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 153 | |
| dc.title | Supercritical carbon dioxide etching of transition metal (Cu, Ni, Co, Fe) thin films | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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