Browsing by Author "Nakashima, A."

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Comparative study of pore size of low-dielectric-constant porous spin-on-glass films using different methods of nondestructive instrumentation

Kondoh, Eiichi
;
Baklanov, Mikhaïl
;
Lin, E.
;
Gidley, D.
;
Nakashima, A.
Journal article
2001, Japanese Journal of Applied Physics Part 2-Letters, (40) 4A, p.L323-L326
Non-destructive determination of pore size distribution of low-k porous SOG films

Baklanov, Mikhaïl
;
Kondoh, Eiichi
;
Gidley, D.
;
Lin, E.
;
Wu, Wen
;
Arao, H.
;
Mogilnikov, K. P.
Oral presentation
2000, 60th Japan Society of Applied Physics Autumn Meeting; September 2000; Japan.