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Comparative study of pore size of low-dielectric-constant porous spin-on-glass films using different methods of nondestructive instrumentation
Publication:
Comparative study of pore size of low-dielectric-constant porous spin-on-glass films using different methods of nondestructive instrumentation
Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kondoh, Eiichi
;
Baklanov, Mikhaïl
;
Lin, E.
;
Gidley, D.
;
Nakashima, A.
Journal
Japanese Journal of Applied Physics Part 2-Letters
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1877
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1877
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations