Publication:
Comparative study of pore size of low-dielectric-constant porous spin-on-glass films using different methods of nondestructive instrumentation
Date
| dc.contributor.author | Kondoh, Eiichi | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Lin, E. | |
| dc.contributor.author | Gidley, D. | |
| dc.contributor.author | Nakashima, A. | |
| dc.date.accessioned | 2021-10-14T17:10:22Z | |
| dc.date.available | 2021-10-14T17:10:22Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5406 | |
| dc.source.beginpage | L323 | |
| dc.source.endpage | L326 | |
| dc.source.issue | 4A | |
| dc.source.journal | Japanese Journal of Applied Physics Part 2-Letters | |
| dc.source.volume | 40 | |
| dc.title | Comparative study of pore size of low-dielectric-constant porous spin-on-glass films using different methods of nondestructive instrumentation | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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