Browsing by Author "Nakatani, K."
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Publication Integration of a k=2.3 spin-on polymer for the sub-28nm technology node
Proceedings paper2012, IEEE International Interconnect Technology Conference - IITC, 4/06/2012Publication Integration of an organic ultra low-k (k=2.2) material
Oral presentation2009, Advanced Metallization Conference - AMCPublication Integration of an organic ultra low-k (k=2.2) material
Proceedings paper2010, Advanced Metallization Conference 2009 - AMC 2009, 13/10/2009, p.173-184