Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Naumov, S."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths

    Prager, L.
    ;
    Marsik, Premysl
    ;
    Wennrich, L.
    ;
    Baklanov, Mikhaïl
    ;
    Naumov, S.
    ;
    Pistol, L.
    ;
    Schneider, D.
    Journal article
    2008, Microelectronic Engineering, (85) 10, p.2094-2097

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings