Browsing by Author "Naumov, S."
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Publication Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths
;Prager, L. ;Marsik, Premysl ;Wennrich, L. ;Baklanov, Mikhaïl ;Naumov, S. ;Pistol, L.Schneider, D.Journal article2008, Microelectronic Engineering, (85) 10, p.2094-2097