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Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths
Publication:
Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths
Date
2008
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Prager, L.
;
Marsik, Premysl
;
Wennrich, L.
;
Baklanov, Mikhaïl
;
Naumov, S.
;
Pistol, L.
;
Schneider, D.
;
Gerlach, J.W.
;
Verdonck, Patrick
;
Buchmeiser, M.R.
Journal
Microelectronic Engineering
Abstract
Description
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1926
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1926
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations