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Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths

Date

2008
Journal article
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dc.contributor.authorPrager, L.
dc.contributor.authorMarsik, Premysl
dc.contributor.authorWennrich, L.
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorNaumov, S.
dc.contributor.authorPistol, L.
dc.contributor.authorSchneider, D.
dc.contributor.authorGerlach, J.W.
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorBuchmeiser, M.R.
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned2021-10-17T10:00:05Z
dc.date.available2021-10-17T10:00:05Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14342
dc.source.beginpage2094
dc.source.endpage2097
dc.source.issue10
dc.source.journalMicroelectronic Engineering
dc.source.volume85
dc.title

Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths

dc.typeJournal article
dspace.entity.typePublication
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