Browsing by Author "Naumov, Sergej"
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Publication Conversion of a patterned organic resist into a high performance inoriganic hard mask for high resolution pattern transfer
Journal article2018, ACS Nano, (12) 11, p.11152-11160Publication Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films
Journal article2016, Applied Physics Letters, (108) 1, p.12902Publication Improved plasma resistance for porous low-k dielectrics by pore stuffing approach
Journal article2015, ECS Journal of Solid State Science and Technology, (4) 1, p.N3098-N3107Publication Mechanism of modification of fluorocarbon polymer by ultraviolet irradiation in oxygen atmosphere
Journal article2013, ECS Journal of Solid State Science and Technology, (2) 5, p.N93-N98