Browsing by Author "Nechaev, Konstantin"
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 129550OPublication Pattern selection strategy by clustering for logic EPE monitoring