Browsing by Author "Negreira, Ainhoa Romo"
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Publication Approaches to Enable Patterning of Tight Pitches towards High NA EUV
;Tadatomo, Hiroki ;Dauendorffer, Arnaud ;Onitsuka, Tomoya ;Genjima, HisashiIdo, YasuyukiProceedings paper2022, Conference on Advanced Etch Technology and Process Integration for Nanopatterning XI Part of SPIE Advanced Lithography and Patterning Conference, APR 24-MAY 27, 2020-2022, p.120560F