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Browsing by Author "Neisser, M."

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    Applying a thin imaging resist system to substrates with topography

    Neisser, M.
    ;
    Grosev, G.
    ;
    Maenhoudt, Mireille
    ;
    Lepage, Muriel
    ;
    Struyf, Herbert  
    Journal article
    2000, Solid State Technology, (43) 8, p.127
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    Metrology for the next generation of semiconductor devices

    Orji, N.G.
    ;
    Badaroglu, M.
    ;
    Barnes, B.M.
    ;
    Beitia, C.
    ;
    Bunday, B.D.
    ;
    Celano, Umberto  
    ;
    Kline, R.J.
    Journal article
    2018, Nature Electronics, 1, p.532-547

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