Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Metrology for the next generation of semiconductor devices
Publication:
Metrology for the next generation of semiconductor devices
Date
2018
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Orji, N.G.
;
Badaroglu, M.
;
Barnes, B.M.
;
Beitia, C.
;
Bunday, B.D.
;
Celano, Umberto
;
Kline, R.J.
;
Neisser, M.
;
Obeng, Y.
;
Vladar, A.E.
Journal
Nature Electronics
Abstract
Description
Metrics
Views
2008
since deposited on 2021-10-26
6
last month
6
last week
Acq. date: 2025-12-08
Citations
Metrics
Views
2008
since deposited on 2021-10-26
6
last month
6
last week
Acq. date: 2025-12-08
Citations