Publication:
Metrology for the next generation of semiconductor devices
Date
| dc.contributor.author | Orji, N.G. | |
| dc.contributor.author | Badaroglu, M. | |
| dc.contributor.author | Barnes, B.M. | |
| dc.contributor.author | Beitia, C. | |
| dc.contributor.author | Bunday, B.D. | |
| dc.contributor.author | Celano, Umberto | |
| dc.contributor.author | Kline, R.J. | |
| dc.contributor.author | Neisser, M. | |
| dc.contributor.author | Obeng, Y. | |
| dc.contributor.author | Vladar, A.E. | |
| dc.contributor.imecauthor | Celano, Umberto | |
| dc.contributor.orcidimec | Celano, Umberto::0000-0002-2856-3847 | |
| dc.date.accessioned | 2021-10-26T00:29:05Z | |
| dc.date.available | 2021-10-26T00:29:05Z | |
| dc.date.issued | 2018 | |
| dc.identifier.issn | 2520-1131 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31454 | |
| dc.identifier.url | https://doi.org/10.1038/s41928-018-0150-9 | |
| dc.source.beginpage | 532 | |
| dc.source.endpage | 547 | |
| dc.source.journal | Nature Electronics | |
| dc.source.volume | 1 | |
| dc.title | Metrology for the next generation of semiconductor devices | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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