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Browsing by Author "Neo, Darren C. J."

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    Publication

    Patterning at the Resolution Limit of Commercial Electron Beam Lithography

    Saifullah, Mohammad S. M.
    ;
    Asbahi, Mohamed  
    ;
    Neo, Darren C. J.
    ;
    Mahfoud, Zackaria
    ;
    Tan, Hui Ru
    Journal article
    2022, NANO LETTERS, (22) 18, p.7432-7440

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