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Browsing by Author "Ngai, Chris"

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    Publication

    Towards manufacturing a 10nm node device with complementary EUV lithography

    Hermans, Jan  
    ;
    Dai, Huixiong
    ;
    Niroomand, Ardavan
    ;
    Laidler, David  
    ;
    Mao, Ming  
    ;
    Chen, Yongmei
    Proceedings paper
    2013, Extreme Ultraviolet (EUV) Lithography IV, 24/02/2013, p.86791K

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