Browsing by Author "Nguyen, A."
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Publication Electron spin resonance analysis of sputtering-induced defects in advanced low-k insulators (k-2.0-2.5)
Journal article2013, Microelectronic Engineering, 109, p.240-243Publication High-resolution electron spin resonance analysis of ion bombardment induced defects in advanced low-k insulators (k=2.0-2.5)
Journal article2013, Applied Physics Letters, (102) 17, p.172908