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Browsing by Author "Nguyen, D. A. P."

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    Degradation of 248nm deep UV photoresist by ion implantation

    Tsvetanova, Diana  
    ;
    Vos, Rita  
    ;
    Vereecke, Guy  
    ;
    Parac-Vogt, Tatjana
    ;
    Clemente, Francesca
    Journal article
    2011, Journal of the Electrochemical Society, (158) 8, p.H785-H794

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