Publication:

Degradation of 248nm deep UV photoresist by ion implantation

Date

2011

Journal article

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Author(s)

Tsvetanova, Diana

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;

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Parac-Vogt, Tatjana

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Clemente, Francesca

;

Vanstreels, Kris

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;

Conard, Thierry

;

Franquet, Alexis

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;

Nguyen, D. A. P.

;

Stesmans, Andre

;

;

;

Journal

Journal of the Electrochemical Society

Statistics

1917 since deposited on 2021-10-19

Acq. date: 2026-10-13