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Browsing by Author "Nielsen, Peter Folmet"

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    Systematic study of shallow junction formation on germanium substrates

    Hellings, Geert  
    ;
    Rosseel, Erik  
    ;
    Clarysse, Trudo
    ;
    Petersen, Dirch Hjorth
    ;
    Hansen, Ole
    Journal article
    2011, Microelectronic Engineering, (88) 4, p.347-350

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