Publication:

Systematic study of shallow junction formation on germanium substrates

Date

2011
Journal article
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Author(s)

Hellings, Geert  
;
Rosseel, Erik  
;
Clarysse, Trudo
;
Petersen, Dirch Hjorth
;
Hansen, Ole
;
Nielsen, Peter Folmet
;
Simoen, Eddy  
;
Eneman, Geert  
;
De Jaeger, Brice  
;
Hoffmann, Thomas Y.
;
De Meyer, Kristin  
;
Vandervorst, Wilfried  

Journal

Microelectronic Engineering

Abstract

Description

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1956 since deposited on 2021-10-19
Acq. date: 2026-05-17

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1956 since deposited on 2021-10-19
Acq. date: 2026-05-17

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