Systematic study of shallow junction formation on germanium substrates

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Author(s)

Hellings, Geert

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;

Clarysse, Trudo

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Petersen, Dirch Hjorth

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;

Nielsen, Peter Folmet

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;

;

De Jaeger, Brice

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Hoffmann, Thomas Y.

;

De Meyer, Kristin

;

Vandervorst, Wilfried

Journal

Microelectronic Engineering

Metrics

1952 since deposited on 2021-10-19

Acq. date: 2025-10-23