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Browsing by Author "Niino, R."

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    Publication

    Gas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materials

    de Marneffe, Jean-Francois  
    ;
    Fujikawa, T.M.
    ;
    Yamaguchi, T.
    ;
    Nozawa, S.
    ;
    Niino, R.
    ;
    Sato, N.
    Meeting abstract
    2018, AVS 65th Meeting & Exhibition 2018, 21/10/2018, p.PSM-WeA9

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