Browsing by Author "Nijmeijer, R."
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Publication Junction and profile analysis using carrier illumination
Proceedings paper2002, Silicon Front-End Junction Formation Technologies, 1/04/2002, p.285-290Publication Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMS
;Borden, P. ;Bechtler, L. ;Klemme, B. ;Nijmeijer, R. ;Judge, E. ;Diebold, A.Bennett, J.Proceedings paper2001, 6th Int. Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors - USJ, 22/04/2001, p.161-167