Browsing by Author "Noakes, T. C. Q."
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Publication High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers
;Reading, M. A. ;van den Berg, J. A. ;Zalm, P. C. ;Armour, D. G. ;Bailey, P. ;Noakes, T. C. Q.Parisini, A.Journal article2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C65-C1C70