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Browsing by Author "Noakes, T. C. Q."

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    High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers

    Reading, M. A.
    ;
    van den Berg, J. A.
    ;
    Zalm, P. C.
    ;
    Armour, D. G.
    ;
    Bailey, P.
    ;
    Noakes, T. C. Q.
    ;
    Parisini, A.
    Journal article
    2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C65-C1C70

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