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Browsing by Author "Novikova, N.N."

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    Publication

    Low-k films modification under EUV and VUV radiation

    Rakhimova, T.
    ;
    Rakhimov, A.
    ;
    Mankelevich, Y.A.
    ;
    Lopaev, D.V.
    ;
    Kovalev, A.S.
    ;
    Vasil'eva, A.N.
    Journal article
    2014, Journal of Physics D: Applied Physics, (47) 2, p.25102

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