Browsing by Author "Novikova, N.N."
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Publication Low-k films modification under EUV and VUV radiation
;Rakhimova, T. ;Rakhimov, A. ;Mankelevich, Y.A. ;Lopaev, D.V. ;Kovalev, A.S.Vasil'eva, A.N.Journal article2014, Journal of Physics D: Applied Physics, (47) 2, p.25102