Low-k films modification under EUV and VUV radiation

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Author(s)

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Mankelevich, Y.A.

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Vasil'eva, A.N.

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Krishtab, Mikhail

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Baklanov, Mikhaïl

Journal

Journal of Physics D: Applied Physics

Metrics

1951 since deposited on 2021-10-22

Acq. date: 2025-10-24