Publication:

Low-k films modification under EUV and VUV radiation

Date

2014
Journal article
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Author(s)

Rakhimova, T.
;
Rakhimov, A.
;
Mankelevich, Y.A.
;
Lopaev, D.V.
;
Kovalev, A.S.
;
Vasil'eva, A.N.
;
Zyryanov, S.M.
;
Kurchikov, K.
;
Proshina, O.
;
Voloshin, D.G.
;
Novikova, N.N.
;
Krishtab, Mikhail  
;
Baklanov, Mikhaïl

Journal

Journal of Physics D: Applied Physics

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