Publication:

Low-k films modification under EUV and VUV radiation

Date

2014

Journal article

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Files

27855.pdf 1.88 MB

Author(s)

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Mankelevich, Y.A.

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Vasil'eva, A.N.

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Krishtab, Mikhail

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Baklanov, Mikhaïl

Journal

Journal of Physics D: Applied Physics

Statistics

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