Publication:

Low-k films modification under EUV and VUV radiation

Date

2014
Journal article
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dc.contributor.authorRakhimova, T.
dc.contributor.authorRakhimov, A.
dc.contributor.authorMankelevich, Y.A.
dc.contributor.authorLopaev, D.V.
dc.contributor.authorKovalev, A.S.
dc.contributor.authorVasil'eva, A.N.
dc.contributor.authorZyryanov, S.M.
dc.contributor.authorKurchikov, K.
dc.contributor.authorProshina, O.
dc.contributor.authorVoloshin, D.G.
dc.contributor.authorNovikova, N.N.
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.imecauthorKrishtab, Mikhail
dc.date.accessioned2021-10-22T04:58:39Z
dc.date.available2021-10-22T04:58:39Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.issn0022-3727
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24416
dc.identifier.urlhttp://iopscience.iop.org/0022-3727/47/2/025102/pdf/0022-3727_47_2_025102.pdf
dc.source.beginpage25102
dc.source.issue2
dc.source.journalJournal of Physics D: Applied Physics
dc.source.volume47
dc.title

Low-k films modification under EUV and VUV radiation

dc.typeJournal article
dspace.entity.typePublication
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