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Browsing by Author "O'Neill, A"

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    Synchrotron measurement of the effect of dielectric porosity and air gaps on the stress in advanced Cu/low-k interconnects

    Wilson, Chris  
    ;
    Zhao, Chao
    ;
    Zhao, Larry
    ;
    Tokei, Zsolt  
    ;
    Croes, Kristof  
    ;
    Pantouvaki, Marianna  
    Proceedings paper
    2009, IEEE Internationa Interconnect Technology Conference - IITC, 1/06/2009, p.72-74

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